Single Wafer Quartz

CGI typically uses grade GE214 quartz for clear fused quartz tubing. The material offers high purity, high transmittance, high temperature, and low hydroxyl (OH)- content, and typically results in excellent visual, thermal, and mechanical properties with tight dimensional tolerances. It can typically withstand the wide thermal gradients and chemical environments of wafer processing operations due to its (OH)- content of typically less than 10 ppm water in most grades. Low (OH)- minimizes the sag rate at diffusion temperatures, and effectively retards the progress of devitrification. Because of its low hydroxyl content, Momentive's tubing does not require special coatings that could potentially release contaminants at elevated temperatures.